各类玻璃基片
材料牌号
|
肖 特 |
Borofloat33 / BK7 / B270 / D263 etc. |
康 宁 |
Eagle XG , Fused Silica 7980 / 7978 / 7979 etc. |
|
|
菲利华 |
Fused Silica JGS1 / JGS2 & Single quartz etc. |
|
小 原 |
SK-1300 |
|
光 明 |
H-K9L / Soda Lime etc. |
加工能力 Processing Capacity
Specification 规格 |
unit |
3” |
4” |
5" |
6" |
8" |
12" |
Diameter (or Square) 直径或方片 |
mm |
76.2 |
100 |
125 |
150 |
200 |
300 |
Tol(±) 公差 |
mm |
<0.1~0.25 mm |
|||||
Thinnest Thickness 最小厚度 |
mm |
>0.10 |
>0.18 |
>0.30 |
>0.30 |
>0.30 |
>0.50 |
Primary Flat 主平台 |
mm |
22 |
32.5 |
42.5 |
57.5/notch |
notch |
notch |
LTV (5mmx5mm) |
µm |
<2 |
<2 |
<2 |
<2 |
<2 |
<10 |
TTV |
µm |
<8 |
<10 |
<15 |
<20 |
<30 |
<30 |
Bow |
µm |
±20 |
±25 |
±40 |
±40 |
±60 |
±60 |
Warp |
µm |
<30 |
<40 |
<50 |
<50 |
<60 |
<60 |
PLTV(<0.5um) |
% |
≥95%(5mm*5mm) |
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Transmittance 透过范围 |
|
UV, Optical, IR or Custom option 紫外、可见光、红外 |
|||||
Edge Rounding 边缘 |
mm |
Compliant with SEMI M1.2 Standard/refer to IEC62276 |
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Surface Type 表面处理 |
|
Single Side Polished /Double Sides Polished 单面抛光/双面抛光 |
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Polished side Ra 抛光面 |
nm |
<1.0nm or specific per requested |
|||||
Back Side Criteria 反面 |
µm |
General is 0.2-0.5µm or as customized |
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Appearance 外观 |
Contamination 污染 |
None |
|||||
Particles微粒 >0.3µm |
<=30 |
||||||
Saw Marks, striations 锯痕,条纹 |
None |
||||||
Scratch 划痕 |
None |
||||||
Cracks, crowsfeel saw marks, stains 裂纹 |
None |
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