各类玻璃基片

肖  特

Borofloat33 / BK7 / B270 / D263 etc.

康  宁

Eagle XG , Fused Silica 7980 / 7978 / 7979 etc.

菲利华

Fused Silica JGS1 / JGS2 & Single quartz etc.

小  原

SK-1300

光  明

H-K9L / Soda Lime etc.

Specification 规格

unit

3”

4”

5"

6"

8"

12"

Diameter (or Square) 直径或方片

mm

76.2

100

125

150

200

300

Tol(±) 公差

mm

<0.1~0.25 mm

Thinnest Thickness 最小厚度

mm

>0.10

>0.18

>0.30

>0.30

>0.30

>0.50

Primary Flat 主平台

mm

22

32.5

42.5

57.5/notch

notch

notch

LTV (5mmx5mm)

µm

<2

<2

<2

<2

<2

<10

TTV

µm

<8

<10

<15

<20

<30

<30

Bow

µm

±20

±25

±40

±40

±60

±60

Warp

µm

<30

<40

<50

<50

<60

<60

PLTV(<0.5um)

%

≥95%(5mm*5mm)

Transmittance 透过范围

UV, Optical, IR or Custom option   紫外、可见光、红外

Edge Rounding 边缘

mm

Compliant with SEMI M1.2 Standard/refer to IEC62276

Surface Type 表面处理

Single Side Polished /Double Sides Polished   单面抛光/双面抛光

Polished side Ra 抛光面

nm

<1.0nm or specific per requested

Back Side Criteria 反面

µm

General is 0.2-0.5µm or as customized

Appearance 外观

Contamination 污染

None

Particles微粒 >0.3µm

<=30

Saw Marks, striations 锯痕，条纹

None

Scratch 划痕

None

Cracks, crowsfeel saw marks, stains 裂纹

None